JPH0745561Y2 - イオン処理装置 - Google Patents

イオン処理装置

Info

Publication number
JPH0745561Y2
JPH0745561Y2 JP1987152397U JP15239787U JPH0745561Y2 JP H0745561 Y2 JPH0745561 Y2 JP H0745561Y2 JP 1987152397 U JP1987152397 U JP 1987152397U JP 15239787 U JP15239787 U JP 15239787U JP H0745561 Y2 JPH0745561 Y2 JP H0745561Y2
Authority
JP
Japan
Prior art keywords
wafer
holder
arm
processing chamber
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987152397U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158660U (en]
Inventor
喜生 田村
茂久 田村
幸夫 笹田
尚志 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1987152397U priority Critical patent/JPH0745561Y2/ja
Publication of JPH0158660U publication Critical patent/JPH0158660U/ja
Application granted granted Critical
Publication of JPH0745561Y2 publication Critical patent/JPH0745561Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1987152397U 1987-10-05 1987-10-05 イオン処理装置 Expired - Lifetime JPH0745561Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987152397U JPH0745561Y2 (ja) 1987-10-05 1987-10-05 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987152397U JPH0745561Y2 (ja) 1987-10-05 1987-10-05 イオン処理装置

Publications (2)

Publication Number Publication Date
JPH0158660U JPH0158660U (en]) 1989-04-12
JPH0745561Y2 true JPH0745561Y2 (ja) 1995-10-18

Family

ID=31427284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987152397U Expired - Lifetime JPH0745561Y2 (ja) 1987-10-05 1987-10-05 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0745561Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280268A (ja) * 1985-10-04 1987-04-13 Hitachi Ltd 微細加工用真空装置

Also Published As

Publication number Publication date
JPH0158660U (en]) 1989-04-12

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